Study of high-power pulsed DC magnetically controlled sputtering preparation TaN film
李英杰
李英杰
Categories: Symposium  /  
Year2019
AuthorLee Ying-Chieh
Author count1
Created date2020-03-18
Author order2
Corresponding authorYes
Publication year2019
Symposium name2019年第十五屆海峽兩岸薄膜科學與技術研討會
Seminar city台北
Seminar country中華民國
Start date2019-08-25
End date2019-08-30
Review systemYes
LanguageTraditional Chinese
Attached project102-2221-E-020-008-MY3