MOCVD磊晶沈積均勻度的三維熱流數值研究(Study on the MOCVD Epitaxy Deposition Uniformity by a Three-Dimensional Flow Model)
姜庭隆
姜庭隆
Categories: Symposium  /  
Year2002
Author
Created date2019-02-19
Author order4
Corresponding authorNo
Publication year2002
Symposium nameB037中華民國力學學會第二十六屆全國力學會議
Seminar country中華民國
Start date2002-12-01
End date2002-12-01
Review systemNo
LanguageTraditional Chinese