MEMS-based humidity sensor with integrated temperature compensation mechanism
李佳言
李佳言
Categories: Journal  /   SCI(Sciences Citation Index)  /  
Year2008
Author
Created date2019-02-19
Author orderFirst author
Corresponding authorYes
Publication year2008
Publication month9
Journal nameSensors and Actuators: A. Physical
Publication area中華民國
Volume147
Start page522
End page528
Review systemNo
LanguageForeign Language
Attached project