Fabrication and Characterization of MEMS-based Flow Sensors Based on Hot Films
李佳言
李佳言
Categories: Journal  /   SCI(Sciences Citation Index)  /  
Year2010
Author
Created date2019-02-19
Author orderFourth (above) author
Corresponding authorYes
Publication year2010
Publication month11
Journal nameJournal of Microsystem Technologies
Publication area中華民國
Volume16
Start page1056
End page1061
Review systemNo
LanguageForeign Language
Attached project