Environmental and health risks of chlorine trifluoride(ClF3), an alternative to potent greenhouse gases in the semiconductor industry
蔡文田
蔡文田
Categories: Journal  /   SCI(Sciences Citation Index)  /  
Year2011
Author
Created date2019-02-19
Author orderFirst author
Corresponding authorYes
Publication year2011
Publication month6
Journal nameJournal of Hazardous Materials
Publication area中華民國
Volume190
Issue1-3
Start page1
End page7
Review systemNo
LanguageForeign Language
Attached project