Effects of laser treatment power and wavelength on crystal quality of AlN films for acoustic wave filter applications
林鉉凱
林鉉凱
Categories: Symposium  /  
Year2017
Author
Created date2019-01-16
Author order1
Corresponding authorYes
Publication year2017
Symposium nameThe 18th International Symposium on Laser Precision Microfabrication (LPM)
Seminar city富山市
Seminar country日本
Start date2017-06-05
End date2017-06-08
Review systemYes
LanguageForeign Language