Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors
李佳言
李佳言
Year2021
Author
Created date2022-03-04
Author orderFirst author
Corresponding authorNo
Publication year2021
Publication month9
Journal nameApplied Sciences
Journal sponsorMDPI
Publication area瑞士聯邦
Volume11
Issue0
Start page9074
End page9085
Review systemYes
LanguageForeign Language
Attached projectMOST 110-2622-E-020-001