多片行星式MOCVD爐內磊晶薄膜均勻度的研究
姜庭隆
姜庭隆
Categories: Journal  /   Foreign Journal (others)  /  
Year2010
Author
Created date2019-02-19
Author orderFirst author
Corresponding authorYes
Publication year2010
Publication month5
Journal nameCombustion Quarterly
Publication area中華民國
Volume19
Issue2
Start page47
End page56
Review systemNo
LanguageTraditional Chinese
Attached project