多片行星式MOCVD爐內晶圓轉速與爐壁溫度對砷化鎵沈積均勻度的數值研究
姜庭隆
姜庭隆
Categories: Symposium  /  
Year2003
Author
Created date2019-02-19
Author order4
Corresponding authorNo
Publication year2003
Symposium name全國力學會議
Seminar country中華民國
Start date2003-12-01
End date2003-12-01
Review systemNo
LanguageTraditional Chinese