單片行星式MOCVD爐內砷化鎵沈積均勻度的研究Deposited Uniformity of GaAs in a Single-Wafer Planetary Type MOCVD Reactor
姜庭隆
姜庭隆
Categories: Symposium  /  
Year2003
Author
Created date2019-02-19
Author order4
Corresponding authorNo
Publication year2003
Symposium name中國機械工程師學會
Seminar country中華民國
Start date2003-12-01
End date2003-12-01
Review systemNo
LanguageTraditional Chinese