PAHs Formation in the Depositions in a Methyl tert-Butyl Ether/Ar, a Methyl tert-Butyl Ether/O2/Ar and a Methyl tert-Butyl Ether/H2/Ar RF Plasma Environment
PAHs Formation in the Depositions in a Methyl tert-Butyl Ether/Ar, a Methyl tert-Butyl Ether/O2/Ar and a Methyl tert-Butyl Ether/H2/Ar RF Plasma Environment
Year | 2002 |
Author | 謝連德*, Guor-Cheng Fang, Hsi-Hsieh Yang, Ya-Fen Wang, Meng-Chun Tsao, Wei-Tung Liao |
Author count | 6 |
Created date | 2019-02-19 |
Author order | 第一作者 |
Corresponding author | 是 |
Publication year | 2002 |
Publication month | 12 |
Journal name | Plasma Chemistry and Plasma Processing (SCI) |
Publication area | 中華民國 |
Volume | 22 |
Issue | 4 |
Start page | 639 |
End page | 658 |
Publication type | |
Review system | 否 |
Language | Foreign Language |
Attached project | 無 |