Properties of low temperature deposited ZnO thin films on the glass substrate by cathodic arc plasma technology with different film thickness
Properties of low temperature deposited ZnO thin films on the glass substrate by cathodic arc plasma technology with different film thickness
Year | 2012 |
Author | 楊茹媛*, 熊京民, Chun-Chih Huang, Tsung-Lin Yang |
Author count | 4 |
Created date | 2019-02-19 |
Author order | 1 |
Corresponding author | false |
Publication year | 2012 |
Symposium name | The 2012 International Conference on Agricultural, Food and Biological Engineering (ICAFBE 2012) |
Publication city | 廣州 |
Publication country | 中華民國 |
Start date | 2012-05-11 |
End date | 2012-05-11 |
Review system | 否 |
Language | Foreign Language |