Properties of low temperature deposited ZnO thin films on the glass substrate by cathodic arc plasma technology with different film thickness

Properties of low temperature deposited ZnO thin films on the glass substrate by cathodic arc plasma technology with different film thickness

Year2012
Author楊茹媛*, 熊京民, Chun-Chih Huang, Tsung-Lin Yang
Author count4
Created date2019-02-19
Author order1
Corresponding authorfalse
Publication year2012
Symposium nameThe 2012 International Conference on Agricultural, Food and Biological Engineering (ICAFBE 2012)
Publication city廣州
Publication country中華民國
Start date2012-05-11
End date2012-05-11
Review system
LanguageForeign Language