PAHs Formation in the Depositions in a Methyl tert-Butyl Ether/Ar, a Methyl tert-Butyl Ether/O2/Ar and a Methyl tert-Butyl Ether/H2/Ar RF Plasma Environment

PAHs Formation in the Depositions in a Methyl tert-Butyl Ether/Ar, a Methyl tert-Butyl Ether/O2/Ar and a Methyl tert-Butyl Ether/H2/Ar RF Plasma Environment

Professor    辦公室: CE422(分機7512) 實驗室: EP207(分機7075)    lthsieh@mail.npust.edu.tw
Year2002
Author謝連德*, Guor-Cheng Fang, Hsi-Hsieh Yang, Ya-Fen Wang, Meng-Chun Tsao, Wei-Tung Liao
Author count6
Created date2019-02-19
Author order第一作者
Corresponding author
Publication year2002
Publication month12
Journal namePlasma Chemistry and Plasma Processing (SCI)
Publication area中華民國
Volume22
Issue4
Start page639
End page658
Publication type
Review system
LanguageForeign Language
Attached project