Numerical Study of the Dlc Film Flow Field on the Ecr-Pecvd Reaction Chamber
| Year | 2008 |
| Author | 戴昌賢*, Lih, F.L., Leong, J.C., Feng, W.C., Li, Y.S. |
| Author count | 5 |
| Created date | 2019-02-19 |
| Author order | 1 |
| Corresponding author | false |
| Publication year | 2008 |
| Symposium name | 2008第六屆全國精密製造研討會The 6th National Conference on Precision Manufacturing |
| Publication city | 台南永康 |
| Publication country | 中華民國 |
| Start date | 2008-11-08 |
| End date | 2008-11-08 |
| Review system | 否 |
| Language | Traditional Chinese |