Micromachined Silicon Cantilever Paddles for High-Flow-Rate Sensing

Micromachined Silicon Cantilever Paddles for High-Flow-Rate Sensing

Year2006
AuthorRong-Hua Ma, 李佳言*, Yu-Hsiang Wang, 傅龍明
Author count4
Created date2019-02-19
Author order第四(以上)作者
Corresponding author
Publication year2006
Publication month12
Journal nameSensors and Materials
Publication area中華民國
Volume6
Issue18
Start page405
End page417
Publication type
Review system
LanguageForeign Language
Attached project