MEMS-based humidity sensor with integrated temperature compensation mechanism
| Year | 2008 |
| Author | 李佳言*, Lung-Tai Chen, Wood-Hi Cheng |
| Author count | 3 |
| Created date | 2019-02-19 |
| Author order | 第一作者 |
| Corresponding author | 是 |
| Publication year | 2008 |
| Publication month | 9 |
| Journal name | Sensors and Actuators: A. Physical |
| Publication area | 中華民國 |
| Volume | 147 |
| Start page | 522 |
| End page | 528 |
| Publication type | |
| Review system | 否 |
| Language | Foreign Language |
| Attached project | 無 |