Improving the Microstructure and Electrical Properties of Aluminum Induced Polysilicon Thin Films Using Silicon Nitride Capping Layer
| Year | 2016 |
| Author | , , , 楊茹媛* |
| Author count | 4 |
| Created date | 2019-02-19 |
| Author order | 第四(以上)作者 |
| Corresponding author | 是 |
| Publication year | 2016 |
| Publication month | 1 |
| Journal name | Journal of Nanomaterials |
| Publication area | 中華民國 |
| Publication type | |
| Review system | 否 |
| Language | Foreign Language |
| Attached project | 無 |