Gas Sensing Properties of ZnO:Al Thin Films Prepared by RF Magnetron Sputtering

Gas Sensing Properties of ZnO:Al Thin Films Prepared by RF Magnetron Sputtering

Professor    7525 7527 7011    n5888107@mail.npust.edu.tw
Year2006
Author張莉毓*, Hong Ming Chen, Yen Hsun Su, Wei Hao Lai, Shih Min Chou, Min Hsiung Hon
Author count6
Created date2019-02-19
Author order1
Corresponding authorfalse
Publication year2006
Symposium name2006 IEEE International Conference on Semiconductor Electronics
Publication country中華民國
Start date2006-11-29
End date2006-11-29
Review system
LanguageForeign Language