Fabrication and Characterization of MEMS-based Flow Sensors

Fabrication and Characterization of MEMS-based Flow Sensors

Year2009
Author, , , , 李佳言*
Author count5
Created date2019-02-19
Author order4
Corresponding authorfalse
Publication year2009
Symposium name第26屆機械工程研討會
Publication city台南
Publication country中華民國
Start date2009-11-20
End date2009-11-20
Review system
LanguageTraditional Chinese