Fabrication and Characterization of MEMS-based Flow Sensors Based on Hot Films
| Year | 2010 |
| Author | Rong-Hua Ma, Yu-Hsiang Wang, Sheng-Ling Chiang, 李佳言* |
| Author count | 4 |
| Created date | 2019-02-19 |
| Author order | 第四(以上)作者 |
| Corresponding author | 是 |
| Publication year | 2010 |
| Publication month | 11 |
| Journal name | Journal of Microsystem Technologies |
| Publication area | 中華民國 |
| Volume | 16 |
| Start page | 1056 |
| End page | 1061 |
| Publication type | |
| Review system | 否 |
| Language | Foreign Language |
| Attached project | 無 |