Fabrication and Characterization of MEMS-based Flow Sensors Based on Hot Films
| Year | 2010 |
| Author | , , , , 李佳言* |
| Author count | 5 |
| Created date | 2019-02-19 |
| Author order | 4 |
| Corresponding author | false |
| Publication year | 2010 |
| Symposium name | Symposium on Design, Test, Integration and Package of MEMS/MOEMS |
| Publication city | Seville |
| Publication country | 中華民國 |
| Start date | 2010-05-06 |
| End date | 2010-05-06 |
| Review system | 否 |
| Language | Foreign Language |