Environmental and health risks of chlorine trifluoride(ClF3), an alternative to potent greenhouse gases in the semiconductor industry
| Year | 2011 |
| Author | 蔡文田* |
| Author count | 1 |
| Created date | 2019-02-19 |
| Author order | 第一作者 |
| Corresponding author | 是 |
| Publication year | 2011 |
| Publication month | 6 |
| Journal name | Journal of Hazardous Materials |
| Publication area | 中華民國 |
| Volume | 190 |
| Issue | 1-3 |
| Start page | 1 |
| End page | 7 |
| Publication type | |
| Review system | 否 |
| Language | Foreign Language |
| Attached project | 無 |