Effects of laser treatment power and wavelength on crystal quality of AlN films for acoustic wave filter applications
| Year | 2017 |
| Author | |
| Created date | 2019-01-16 |
| Author order | 1 |
| Corresponding author | true |
| Publication year | 2017 |
| Symposium name | The 18th International Symposium on Laser Precision Microfabrication (LPM) |
| Publication city | 富山市 |
| Publication country | 日本 |
| Start date | 2017-06-05 |
| End date | 2017-06-08 |
| Review system | 是 |
| Language | Foreign Language |