Effect of the Bias Voltage on the Structure, Mechanical, Electronic and Optical Properties of the Low Temperature ZnO Thin Films Deposited by Using Cathodic Vacuum Arc Deposition System on Plastic Substrates

Effect of the Bias Voltage on the Structure, Mechanical, Electronic and Optical Properties of the Low Temperature ZnO Thin Films Deposited by Using Cathodic Vacuum Arc Deposition System on Plastic Substrates

Year2014
Author楊茹媛*, ,
Author count3
Created date2019-02-19
Author order第一作者
Corresponding author
Publication year2014
Publication month1
Journal name Materials Science Forum
Publication area中華民國
Issue773-774
Start page287
End page292
Publication type
Review system
LanguageForeign Language
Attached project