Effect of Substrate-Thickness on Voltage Responsivity of MEMS-Based ZnO Pyroelectric Infrared Sensors
| Year | 2021 |
| Author | 李佳言, , , * |
| Author count | 4 |
| Created date | 2022-03-04 |
| Author order | 第一作者 |
| Corresponding author | 否 |
| Publication year | 2021 |
| Publication month | 9 |
| Journal name | Applied Sciences |
| Journal sponsor | MDPI |
| Publication area | 瑞士聯邦 |
| Volume | 11 |
| Issue | 0 |
| Start page | 9074 |
| End page | 9085 |
| Publication type | |
| Review system | 是 |
| Language | Foreign Language |
| Attached project | MOST 110-2622-E-020-001 |