Effect of Electrode Material on Sensing Performance of MEMS-based Pyroelectric Sensor

Effect of Electrode Material on Sensing Performance of MEMS-based Pyroelectric Sensor

Year2024
AuthorXiong-Zhen, Tsai, Chia-Yu, 李佳言*
Author count3
Created date2024-09-03
Author order第三作者
Corresponding author
Publication year2024
Publication month9
Journal nameSensors and Materials
Journal sponsorMYU K.K.
Publication area日本
Volume36
Issue9
Start page3663
End page3676
Publication type
Review system
LanguageForeign Language
Attached project