Effect of Annealing on Microstructure and Dielectric Properties of Zn2Ti3O8 Thin Films by Reactive Co-sputtering

Effect of Annealing on Microstructure and Dielectric Properties of Zn2Ti3O8 Thin Films by Reactive Co-sputtering

Year2011
AuthorY. L. Huang*, 李英杰, D. C. Tsai, D. R. Jung, F. S. Shieu
Author count5
Created date2019-02-19
Author order2
Corresponding authorfalse
Publication year2011
Symposium nameTACT 2011 International Thin Films Conference
Publication cityKenting
Publication country中華民國
Start date2011-11-23
End date2011-11-23
Review system
LanguageForeign Language