Design and Packaging of MEMS-Based Flow-Rate and Flow-Direction Microsensor

Design and Packaging of MEMS-Based Flow-Rate and Flow-Direction Microsensor

Year2009
Author李佳言, , , , 蔡建雄, 傅龍明*
Author count6
Created date2019-02-19
Author order第四(以上)作者
Corresponding author
Publication year2009
Publication month3
Journal nameMicrofluidics and Nanofluidics
Journal sponsorSpringer
Publication area中華民國
Issue6
Start page363
End page371
Publication type
Review system
LanguageForeign Language
Attached project