Decomposition of Boron Trifluoride in the RF plasma environment
| Year | 2003 |
| Author | Ya-Fen Wang*, Cheng-Hsieh Tsai, 謝連德, Min-Liang Shih, Wen-Ching Chang |
| Author count | 5 |
| Created date | 2019-02-19 |
| Author order | 第三作者 |
| Corresponding author | 否 |
| Publication year | 2003 |
| Publication month | 6 |
| Journal name | Aerosol and Air Quality Research |
| Publication area | 中華民國 |
| Volume | 3 |
| Start page | 53 |
| End page | 59 |
| Publication type | |
| Review system | 否 |
| Language | Foreign Language |
| Attached project | 無 |