Characterization of aluminum-doped zinc oxide (AZO) thin films by rf magnetron sputtering at different substrate temperature and sputtering power
| Year | 2013 |
| Author | , 楊茹媛*, , |
| Author count | 4 |
| Created date | 2019-02-19 |
| Author order | 第二作者 |
| Corresponding author | 是 |
| Publication year | 2013 |
| Publication month | 1 |
| Journal name | Journal of Materials Science: Materials in Electronics |
| Publication area | 中華民國 |
| Volume | 24 |
| Start page | 166 |
| End page | 171 |
| Publication type | |
| Review system | 否 |
| Language | Foreign Language |
| Attached project | 無 |