An Experimental Design for Processing Parameter Optimization for Cathode Arc Plasma Deposition of ZnO Films
| Year | 2016 |
| Author | |
| Created date | 2019-01-16 |
| Author order | 第三作者 |
| Corresponding author | 否 |
| Publication year | 2016 |
| Publication month | 6 |
| Journal name | IEEE Transactions on Automation Science and Engineering |
| Publication area | 美國 |
| Volume | 13 |
| Issue | 4 |
| Publication type | |
| Review system | 是 |
| Language | Foreign Language |
| Attached project | NSC 101-2628-E-020-002-MY3 |