A MEMS-based flow rate and flow direction sensing platform with integrated temperature compensation scheme

A MEMS-based flow rate and flow direction sensing platform with integrated temperature compensation scheme

Year2009
AuthorMa Rong-Hua, Wang Dung-An, Hsueh Tzu-Han, 李佳言*
Author count4
Created date2019-02-19
Author order第四(以上)作者
Corresponding author
Publication year2009
Publication month7
Journal nameSensors
Publication area中華民國
Volume9
Start page5460
End page5476
Publication type
Review system
LanguageForeign Language
Attached project