量產型MOCVD爐內砷化鎵沉積均勻度的數值研究

量產型MOCVD爐內砷化鎵沉積均勻度的數值研究

Professor    08-7703202#7459、(L)7604    chtsai@mail.npust.edu.tw
Year2003
Author蔡建雄*
Author count1
Created date2019-02-19
Author order1
Corresponding authorfalse
Publication year2003
Symposium name第二十屆機械工程研討會20th National Conference on Mechanical Engineering
Publication country中華民國
Start date2003-12-01
End date2003-12-01
Review system
LanguageTraditional Chinese