量產型MOCVD爐內砷化鎵沉積均勻度的數值研究
Professor
08-7703202#7459、(L)7604
chtsai@mail.npust.edu.tw
| Year | 2003 |
| Author | 蔡建雄* |
| Author count | 1 |
| Created date | 2019-02-19 |
| Author order | 1 |
| Corresponding author | false |
| Publication year | 2003 |
| Symposium name | 第二十屆機械工程研討會20th National Conference on Mechanical Engineering |
| Publication country | 中華民國 |
| Start date | 2003-12-01 |
| End date | 2003-12-01 |
| Review system | 否 |
| Language | Traditional Chinese |