磁力輔助低溫常壓電漿對銅箔基板表面精微拋光改善之研究

磁力輔助低溫常壓電漿對銅箔基板表面精微拋光改善之研究

Associate Professor    7022    yhchen@mail.npust.edu.tw
Year2021
Author陳永祥*
Author count1
Created date2022-03-16
Author order3
Corresponding authortrue
Publication year2021
Symposium name2021第19屆精密機械與製造科技研討會(PMMT 2021)
Start page1
End page7
Publication city屏東
Publication country中華民國
Start date2021-06-11
End date2021-06-11
Review system
LanguageTraditional Chinese