磁力輔助低溫常壓電漿對銅箔基板表面精微拋光改善之研究
| Year | 2021 |
| Author | 陳晧隆* |
| Author count | 1 |
| Created date | 2021-09-15 |
| Author order | 1 |
| Corresponding author | true |
| Publication year | 2021 |
| Symposium name | 第19屆精密機械與製造科技研討會論文集 |
| Publication city | 屏東墾丁 |
| Publication country | 中華民國 |
| Start date | 2021-05-21 |
| End date | 2021-05-23 |
| Review system | 是 |
| Language | Traditional Chinese |
| Attached project | MOST 107-2622-E-020-012 -CC3 |