直流磁控濺鍍系統沉積鎳鉻矽薄膜之研究
Year | 2010 |
Author | , 李英杰*, |
Author count | 3 |
Created date | 2019-02-19 |
Author order | 2 |
Corresponding author | false |
Publication year | 2010 |
Symposium name | 2010年能源與光電薄膜科技研討會, 台灣鍍膜科技協會年會(AMTACT 2010) |
Publication city | 彰化 |
Publication country | 中華民國 |
Start date | 2010-12-10 |
End date | 2010-12-10 |
Review system | 否 |
Language | Traditional Chinese |