射頻磁控濺鍍摻雜銅對鈦酸鋅薄膜中相變化及微結構的影響

射頻磁控濺鍍摻雜銅對鈦酸鋅薄膜中相變化及微結構的影響

張莉毓

College of Engineering Department of Mechanical Engineering

Professor 7525 7527 7011 n5888107@mail.npust.edu.tw

Year	2012
Author	盧威華, 張莉毓, , , 李英杰*
Author count	5
Created date	2019-02-19
Author order	第二作者
Corresponding author	否
Publication year	2012
Publication month	10
Journal name	北京科技大學學報
Publication area	中華民國
Volume	34
Issue	10
Start page	1173
End page	1177
Publication type
Review system	否
Language	Traditional Chinese
Attached project	無