多片行星式MOCVD爐內磊晶薄膜均勻度的研究

多片行星式MOCVD爐內磊晶薄膜均勻度的研究

姜庭隆

Chiang Ting-Lung

College of Engineering Department of Mechanical Engineering

Associate Professor 7005 tchiang@mail.npust.edu.tw

Year	2010
Author	姜庭隆*, 熊京民
Author count	2
Created date	2019-02-19
Author order	第一作者
Corresponding author	是
Publication year	2010
Publication month	5
Journal name	Combustion Quarterly
Publication area	中華民國
Volume	19
Issue	2
Start page	47
End page	56
Publication type
Review system	否
Language	Traditional Chinese
Attached project	無