多片行星式MOCVD爐內砷化鎵沈積均勻度的研究Deposited Uniformity of GaAs in a Multi-Wafer Planetary Type MOCVD Reactor
| Year | 2003 |
| Author | |
| Created date | 2019-02-19 |
| Author order | 4 |
| Corresponding author | false |
| Publication year | 2003 |
| Symposium name | 中國機械工程師學會 |
| Publication country | 中華民國 |
| Start date | 2003-12-01 |
| End date | 2003-12-01 |
| Review system | 否 |
| Language | Traditional Chinese |