壓電氣體感測器之氮化鋁薄膜沉積

壓電氣體感測器之氮化鋁薄膜沉積

李佳言

College of Engineering Department of Vehicle Engineering Department of Materials Engineering Undergraduate Program in Advanced Materials

Professor 08-7703202#7561、(L)7565 leecy@mail.npust.edu.tw

Year	2009
Author	, , , , , 李佳言, 洪廷甫*
Author count	7
Created date	2019-02-19
Author order	4
Corresponding author	false
Publication year	2009
Symposium name	2009『屏東科技大學』暨『北京科技大學』第四屆學術交流研討會
Publication city	屏東
Publication country	中華民國
Start date	2009-11-06
End date	2009-11-06
Review system	否
Language	Traditional Chinese