在氬氣裡以不同溫度退火對氮化鋁薄膜MSM光檢測器之光電性能之影響

在氬氣裡以不同溫度退火對氮化鋁薄膜MSM光檢測器之光電性能之影響

熊京民

Hsiung Ching-Min

College of Engineering Department of Mechanical Engineering

Professor hsiung@mail.npust.edu.tw

Year	2009
Author	熊京民, 楊茹媛*,
Author count	3
Created date	2019-02-19
Author order	1
Corresponding author	false
Publication year	2009
Symposium name	2009海峽兩岸現代工程科技應用研討會
Publication city	台南
Publication country	中華民國
Start date	2009-05-06
End date	2009-05-06
Review system	否
Language	Traditional Chinese