以臨界電流法檢測直流濺鍍AlN薄膜孔隙度

以臨界電流法檢測直流濺鍍AlN薄膜孔隙度

熊京民

Hsiung Ching-Min

College of Engineering Department of Mechanical Engineering

Professor hsiung@mail.npust.edu.tw

Year	2009
Author	熊京民, 姜庭隆*,
Author count	3
Created date	2019-02-19
Author order	1
Corresponding author	false
Publication year	2009
Symposium name	2009 精密機械與製造科技研討會
Publication city	屏東
Publication country	中華民國
Start date	2009-05-23
End date	2009-05-23
Review system	否
Language	Traditional Chinese