以田口法改善MOCVD砷化鎵的沉積均勻度

以田口法改善MOCVD砷化鎵的沉積均勻度

熊京民

Hsiung Ching-Min

College of Engineering Department of Mechanical Engineering

Professor hsiung@mail.npust.edu.tw

Year	2009
Author	姜庭隆, 熊京民*, , ,
Author count	5
Created date	2019-02-19
Author order	2
Corresponding author	false
Publication year	2009
Symposium name	2009 精密機械與製造科技研討會
Publication city	屏東
Publication country	中華民國
Start date	2009-05-23
End date	2009-05-23
Review system	否
Language	Traditional Chinese