Effect of Electrode Material on Sensing Performance of MEMS-based Pyroelectric Sensor

Effect of Electrode Material on Sensing Performance of MEMS-based Pyroelectric Sensor

Year2023
AuthorXiong-Zhen, 李佳言*
Author count2
Created date2024-03-01
Author order2
Corresponding authortrue
Publication year2023
Symposium name中國機械工程學會第四十屆全國學術研討會
Start page247
End page251
Publication city彰化
Publication country中華民國
Start date2023-12-01
End date2023-12-02
Review system
LanguageTraditional Chinese