Design and Fabrication of Micro Ozone Sensor based on SnO2 Thin Film

Design and Fabrication of Micro Ozone Sensor based on SnO2 Thin Film

Year2023
AuthorLin, Tsung-Ching, Yan, Sheng-Hua, 李佳言*
Author count3
Created date2024-03-01
Author order3
Corresponding authortrue
Publication year2023
Symposium name中國機械工程學會第四十屆全國學術研討會
Start page241
End page244
Publication city彰化
Publication country中華民國
Start date2023-12-01
End date2023-12-02
Review system
LanguageTraditional Chinese