Design and Fabrication of Micro Ozone Sensor based on ZnO Thin Film

Design and Fabrication of Micro Ozone Sensor based on ZnO Thin Film

Year2023
AuthorTang, Shih-Chang, LU BIN-WEY, , 李佳言*
Author count4
Created date2023-09-11
Author order4
Corresponding authortrue
Publication year2023
Symposium name023 International Conference on Smart Sensors
Start page1
End page2
Publication cityTainan
Publication country中華民國
Start date2023-06-19
End date2023-06-20
Review system
LanguageForeign Language