Design and Fabrication of Micro Ozone Sensor based on WO3 Thin Film

Design and Fabrication of Micro Ozone Sensor based on WO3 Thin Film

Year2023
AuthorHung, Yi-Cheng, LIN ZIH YUE , , 李佳言*
Author count4
Created date2023-09-11
Author order3
Corresponding authortrue
Publication year2023
Symposium nameInternational Conference on Applied System Innovation
Start page1
End page4
Publication cityChiba
Publication country日本
Start date2023-04-21
End date2023-04-25
Review system
LanguageForeign Language