Study of high-power pulsed DC magnetically controlled sputtering preparation TaN film

Study of high-power pulsed DC magnetically controlled sputtering preparation TaN film

Year2019
Author李英杰*
Author count1
Created date2020-03-18
Author order2
Corresponding authortrue
Publication year2019
Symposium name2019年第十五屆海峽兩岸薄膜科學與技術研討會
Publication city台北
Publication country中華民國
Start date2019-08-25
End date2019-08-30
Review system
LanguageTraditional Chinese
Attached project102-2221-E-020-008-MY3