Study of high-power pulsed DC magnetically controlled sputtering preparation TaN film
| Year | 2019 |
| Author | 李英杰* |
| Author count | 1 |
| Created date | 2020-03-18 |
| Author order | 2 |
| Corresponding author | true |
| Publication year | 2019 |
| Symposium name | 2019年第十五屆海峽兩岸薄膜科學與技術研討會 |
| Publication city | 台北 |
| Publication country | 中華民國 |
| Start date | 2019-08-25 |
| End date | 2019-08-30 |
| Review system | 是 |
| Language | Traditional Chinese |
| Attached project | 102-2221-E-020-008-MY3 |