Study of high-power pulsed DC magnetically controlled sputtering preparation TaN film
Year | 2019 |
Author | 李英杰* |
Author count | 1 |
Created date | 2020-03-18 |
Author order | 2 |
Corresponding author | true |
Publication year | 2019 |
Symposium name | 2019年第十五屆海峽兩岸薄膜科學與技術研討會 |
Publication city | 台北 |
Publication country | 中華民國 |
Start date | 2019-08-25 |
End date | 2019-08-30 |
Review system | 是 |
Language | Traditional Chinese |
Attached project | 102-2221-E-020-008-MY3 |