The Construction of Coherence Microscope for Extreme Ultraviolet Mask Defect Inspection in Synchrotron Facility
| Year | 2017 |
| Author | 林章生, 陳韋誠 |
| Author count | 2 |
| Created date | 2019-09-29 |
| Author order | 1 |
| Corresponding author | true |
| Publication year | 2017 |
| Symposium name | 2017 IEEE/SICE International Symposium on System Integration |
| Publication city | 台北 |
| Publication country | 中華民國 |
| Start date | 2017-12-11 |
| End date | 2017-12-14 |
| Review system | 是 |
| Language | Traditional Chinese |